热发射离子源
The simulation results have provided useful references for these problems such as thermal cathode primary electron emission, the determination of ion beam derivation area and the effective confinement of discharge plasma in the design of ion source.
计算结果对于离子源设计中的阴极热电子发射、离子束有效引出面积确定及等离子体的有效约束等重要问题有一定参考价值。
An argon ion source used for sputtering deposition has been successfully developed based on the construction of hollow cathode connecting hollow anode and the technologies of thermal cathode electron emission arc discharge, plasma magnetic confinement and ion extracting on a curving surface.
本文采用空心阴极空心阳极结构,用热阴极电子发射弧放电驱动并用磁场约束产生等离子体,用曲面发射引出离子束,研制成了氩气放电溅射离子源;
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